Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
"Seongbo Shim, Youngsoo Shin"
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - Springer 2018
978-3-319-76294-4
Materials Science; Nanotechnology; Nanotechnology and Microengineering; Circuits and Systems; Optical and Electronic Materials; Nanoscale Science and Technology; Semiconductors
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - Springer 2018
978-3-319-76294-4
Materials Science; Nanotechnology; Nanotechnology and Microengineering; Circuits and Systems; Optical and Electronic Materials; Nanoscale Science and Technology; Semiconductors