TY - BOOK AU - Tuncay Ozel TI - Coaxial Lithography SN - 978-3-319-45414-6 PB - Springer KW - "Chemistry; Electrochemistry; Nanotechnology; Optics, Lasers, Photonics, Optical Devices; Nanochemistry" UR - http://link.springer.com/openurl?genre=book&isbn=978-3-319-45414-6 ER -