TY  - BOOK
AU  - Christo Papadopoulos
TI  - Nanofabrication
SN  - 978-3-319-31742-7
PB  - Springer
KW  - "Materials Science; Nanotechnology; Electronics and Microelectronics, Instrumentation; Semiconductors; Nanoscale Science and Technology"
UR  - http://link.springer.com/openurl?genre=book&isbn=978-3-319-31742-7
ER  -