"Seongbo Shim, Youngsoo Shin" <br/><br/>
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography 

 -  Springer  2018 
<br/><br/><label>ISBN: </label>978-3-319-76294-4 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Materials Science; Nanotechnology; Nanotechnology and Microengineering; Circuits and Systems; Optical and Electronic Materials; Nanoscale Science and Technology; Semiconductors