TY  - BOOK
AU  - "Seongbo Shim, Youngsoo Shin"
TI  - Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
SN  - 978-3-319-76294-4
PB  - Springer
KW  - Materials Science; Nanotechnology; Nanotechnology and Microengineering; Circuits and Systems; Optical and Electronic Materials; Nanoscale Science and Technology; Semiconductors
UR  - http://link.springer.com/openurl?genre=book&isbn=978-3-319-76294-4
ER  -