"Cor Claeys, Eddy Simoen" <br/><br/>
Metal Impurities in Silicon- and Germanium-Based Technologies  

 -  Springer  2018 
<br/><br/><label>ISBN: </label>978-3-319-93925-4 
<br/><br/><label>Subjects--Topical Terms: </label><br/>"Materials Science; Optical and Electronic Materials; Microwaves, RF and Optical Engineering; Semiconductors; Electronic Circuits and Devices; Characterization and Evaluation of Materials"