TY - BOOK AU - "Qingsong Xu, Kok Kiong Tan" TI - Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems SN - 978-3-319-21623-2 PB - Springer KW - Engineering; Control; Nanotechnology and Microengineering; Industrial and Production Engineering; Mechatronics UR - http://link.springer.com/openurl?genre=book&isbn=978-3-319-21623-2 ER -