TY - BOOK AU - Xiao-Sheng Zhang TI - Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting SN - 978-3-662-48816-4 PB - Springer KW - "Engineering; Nanotechnology and Microengineering; Microengineering; Energy Harvesting; Electronics and Microelectronics, Instrumentation; Nanotechnology" UR - http://link.springer.com/openurl?genre=book&isbn=978-3-662-48816-4 ER -