"Bei Yu, David Z. Pan" <br/><br/>
Design for Manufacturability with Advanced Lithography 

 -  Springer  2016 
<br/><br/><label>ISBN: </label>978-3-319-20385-0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>"Engineering; Circuits and Systems; Processor Architectures; Electronics and Microelectronics, Instrumentation"