TY  - BOOK
AU  - "Bei Yu, David Z. Pan"
TI  - Design for Manufacturability with Advanced Lithography
SN  - 978-3-319-20385-0
PB  - Springer
KW  - "Engineering; Circuits and Systems; Processor Architectures; Electronics and Microelectronics, Instrumentation"
UR  - http://link.springer.com/openurl?genre=book&isbn=978-3-319-20385-0
ER  -