"Changhai Ru, Xinyu Liu, Yu Sun" <br/><br/>
Nanopositioning Technologies 

 -  Springer  2016 
<br/><br/><label>ISBN: </label>978-3-319-23853-1 
<br/><br/><label>Subjects--Topical Terms: </label><br/>"Engineering; Nanotechnology and Microengineering; Electronics and Microelectronics, Instrumentation; Control, Robotics, Mechatronics; Engineering Design"