TY - BOOK AU - "Changhai Ru, Xinyu Liu, Yu Sun" TI - Nanopositioning Technologies SN - 978-3-319-23853-1 PB - Springer KW - "Engineering; Nanotechnology and Microengineering; Electronics and Microelectronics, Instrumentation; Control, Robotics, Mechatronics; Engineering Design" UR - http://link.springer.com/openurl?genre=book&isbn=978-3-319-23853-1 ER -