"Barton C. Prorok, LaVern Starman" <br/><br/>
"MEMS and Nanotechnology, Volume 5" 

 -  Springer  2016 
<br/><br/><label>ISBN: </label>978-3-319-22458-9 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering; Nanotechnology and Microengineering