TY  - BOOK
AU  - "Barton C. Prorok, LaVern Starman"
TI  - "MEMS and Nanotechnology, Volume 5"
SN  - 978-3-319-22458-9
PB  - Springer
KW  - Engineering; Nanotechnology and Microengineering
UR  - http://link.springer.com/openurl?genre=book&isbn=978-3-319-22458-9
ER  -