"Harmeet Bhugra, Gianluca Piazza" <br/><br/>
Piezoelectric MEMS Resonators 

 -  Springer  2017 
<br/><br/><label>ISBN: </label>978-3-319-28688-4 
<br/><br/><label>Subjects--Topical Terms: </label><br/>"Engineering; Electronics and Microelectronics, Instrumentation; Nanotechnology and Microengineering; Nanotechnology; Optical and Electronic Materials"