TY - BOOK AU - "Harmeet Bhugra, Gianluca Piazza" TI - Piezoelectric MEMS Resonators SN - 978-3-319-28688-4 PB - Springer KW - "Engineering; Electronics and Microelectronics, Instrumentation; Nanotechnology and Microengineering; Nanotechnology; Optical and Electronic Materials" UR - http://link.springer.com/openurl?genre=book&isbn=978-3-319-28688-4 ER -