TY - BOOK AU - "Dan Zhang, Bin Wei" TI - Advanced Mechatronics and MEMS Devices II SN - 978-3-319-32180-6 PB - Springer KW - "Engineering; Nanotechnology and Microengineering; Control, Robotics, Mechatronics; Biomedical Engineering; Mechanical Engineering" UR - http://link.springer.com/openurl?genre=book&isbn=978-3-319-32180-6 ER -