TY - BOOK AU - Alexey Ivanov TI - Silicon Anodization as a Structuring Technique SN - 978-3-658-19238-9 PB - Springer KW - "Engineering; Nanotechnology and Microengineering; Mathematical and Computational Engineering; Engineering Thermodynamics, Heat and Mass Transfer" UR - http://link.springer.com/openurl?genre=book&isbn=978-3-658-19238-9 ER -