TY - BOOK AU - "Mark J. Jackson, Waqar Ahmed" TI - Micro and Nanomanufacturing Volume II SN - 978-3-319-67132-1 PB - Springer KW - "Engineering; Nanotechnology and Microengineering; Mechanical Engineering; Electronics and Microelectronics, Instrumentation" UR - http://link.springer.com/openurl?genre=book&isbn=978-3-319-67132-1 ER -