Qing-An Huang <br/><br/>
Micro Electro Mechanical Systems 

 -  Springer  2018 
<br/><br/><label>ISBN: </label>978-981-10-5945-2 
<br/><br/><label>Subjects--Topical Terms: </label><br/>"Engineering; Mechatronics; Nanotechnology and Microengineering; Electronics and Microelectronics, Instrumentation; Microwaves, RF and Optical Engineering"