Bolanakis <br/><br/>
"MEMS Barometers Toward Vertical Position Detection: Background Theory, System Prototyping, and Measurement Analysis" 

 -  Morgan Claypool 
<br/><br/><label>ISBN: </label>9781627059688 
<br/><br/><label>Subjects--Topical Terms: </label><br/>"Components, Circuits, Devices and Systems; Engineered Materials, Dielectrics and Plasmas; Fields, Waves and Electromagnetics"