TY - BOOK AU - Bolanakis TI - "MEMS Barometers Toward Vertical Position Detection: Background Theory, System Prototyping, and Measurement Analysis" SN - 9781627059688 PB - Morgan Claypool KW - "Components, Circuits, Devices and Systems; Engineered Materials, Dielectrics and Plasmas; Fields, Waves and Electromagnetics" UR - https://ieeexplore.ieee.org/servlet/opac?bknumber=7924451 ER -