| 000 | 00516nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210311s9999 xx 000 0 und d | ||
| 020 | _a978-3-319-31742-7 | ||
| 100 | _aChristo Papadopoulos | ||
| 245 | 0 | _aNanofabrication | |
| 260 | _bSpringer | ||
| 260 | _c2016 | ||
| 650 | _a"Materials Science; Nanotechnology; Electronics and Microelectronics, Instrumentation; Semiconductors; Nanoscale Science and Technology" | ||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-3-319-31742-7 | ||
| 942 | _cEBOOK | ||
| 999 |
_c34612 _d34612 |
||