000			00530nam a2200145Ia 4500
008			210311s9999 xx 000 0 und d
020			_a978-3-662-55927-7
100			_aBernd Schultrich
245		0	_aTetrahedrally Bonded Amorphous Carbon Films I
260			_bSpringer
260			_c2018
650			_a"Materials Science; Structural Materials; Characterization and Evaluation of Materials; Surfaces and Interfaces, Thin Films"
856			_uhttp://link.springer.com/openurl?genre=book&isbn=978-3-662-55927-7
942			_cEBOOK
999			_c35195 _d35195