| 000 | 00623nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210311s9999 xx 000 0 und d | ||
| 020 | _a978-3-319-76294-4 | ||
| 100 | _a"Seongbo Shim, Youngsoo Shin" | ||
| 245 | 0 | _aPhysical Design and Mask Synthesis for Directed Self-Assembly Lithography | |
| 260 | _bSpringer | ||
| 260 | _c2018 | ||
| 650 | _aMaterials Science; Nanotechnology; Nanotechnology and Microengineering; Circuits and Systems; Optical and Electronic Materials; Nanoscale Science and Technology; Semiconductors | ||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-3-319-76294-4 | ||
| 942 | _cEBOOK | ||
| 999 |
_c35202 _d35202 |
||