| 000 | 00575nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210311s9999 xx 000 0 und d | ||
| 020 | _a978-3-319-91896-9 | ||
| 100 | _a"Stephen M. Goodnick, Anatoli Korkin, Robert Nemanich" | ||
| 245 | 0 | _aSemiconductor Nanotechnology | |
| 260 | _bSpringer | ||
| 260 | _c2018 | ||
| 650 | _aMaterials Science; Nanotechnology; Semiconductors; Nanotechnology and Microengineering; Renewable and Green Energy; Nanoscale Science and Technology | ||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-3-319-91896-9 | ||
| 942 | _cEBOOK | ||
| 999 |
_c35313 _d35313 |
||