| 000 | 00620nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210311s9999 xx 000 0 und d | ||
| 020 | _a978-3-319-93925-4 | ||
| 100 | _a"Cor Claeys, Eddy Simoen" | ||
| 245 | 0 | _aMetal Impurities in Silicon- and Germanium-Based Technologies | |
| 260 | _bSpringer | ||
| 260 | _c2018 | ||
| 650 | _a"Materials Science; Optical and Electronic Materials; Microwaves, RF and Optical Engineering; Semiconductors; Electronic Circuits and Devices; Characterization and Evaluation of Materials" | ||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-3-319-93925-4 | ||
| 942 | _cEBOOK | ||
| 999 |
_c35326 _d35326 |
||