| 000 | 00545nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210311s9999 xx 000 0 und d | ||
| 020 | _a978-981-13-2571-7 | ||
| 100 | _a"Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao" | ||
| 245 | 0 | _aThermoelectrical Effect in SiC for High-Temperature MEMS Sensors | |
| 260 | _bSpringer | ||
| 260 | _c2018 | ||
| 650 | _aMaterials Science; Nanotechnology; Nanotechnology and Microengineering; Solid State Physics | ||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-981-13-2571-7 | ||
| 942 | _cEBOOK | ||
| 999 |
_c35369 _d35369 |
||