| 000 | 00559nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210311s9999 xx 000 0 und d | ||
| 020 | _a978-3-319-23853-1 | ||
| 100 | _a"Changhai Ru, Xinyu Liu, Yu Sun" | ||
| 245 | 0 | _aNanopositioning Technologies | |
| 260 | _bSpringer | ||
| 260 | _c2016 | ||
| 650 | _a"Engineering; Nanotechnology and Microengineering; Electronics and Microelectronics, Instrumentation; Control, Robotics, Mechatronics; Engineering Design" | ||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-3-319-23853-1 | ||
| 942 | _cEBOOK | ||
| 999 |
_c36021 _d36021 |
||