000 00466nam a2200145Ia 4500
008 210311s9999 xx 000 0 und d
020 _a978-3-319-39361-2
100 _aZheng Cui
245 0 _aNanofabrication
260 _bSpringer
260 _c2017
650 _aEngineering; Nanotechnology and Microengineering; Circuits and Systems; Classical Electrodynamics
856 _uhttp://link.springer.com/openurl?genre=book&isbn=978-3-319-39361-2
942 _cEBOOK
999 _c36416
_d36416