000 00542nam a2200145Ia 4500
008 210311s9999 xx 000 0 und d
020 _a978-3-319-50824-5
100 _a"Ting Li, Ziv Liu"
245 0 _a"Outlook and Challenges of Nano Devices, Sensors, and MEMS"
260 _bSpringer
260 _c2017
650 _aEngineering; Circuits and Systems; Electronic Circuits and Devices; Nanotechnology and Microengineering; Nanotechnology
856 _uhttp://link.springer.com/openurl?genre=book&isbn=978-3-319-50824-5
942 _cEBOOK
999 _c36812
_d36812