| 000 | 00558nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210311s9999 xx 000 0 und d | ||
| 020 | _a978-3-319-28688-4 | ||
| 100 | _a"Harmeet Bhugra, Gianluca Piazza" | ||
| 245 | 0 | _aPiezoelectric MEMS Resonators | |
| 260 | _bSpringer | ||
| 260 | _c2017 | ||
| 650 | _a"Engineering; Electronics and Microelectronics, Instrumentation; Nanotechnology and Microengineering; Nanotechnology; Optical and Electronic Materials" | ||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-3-319-28688-4 | ||
| 942 | _cEBOOK | ||
| 999 |
_c37008 _d37008 |
||