| 000 | 00550nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210311s9999 xx 000 0 und d | ||
| 020 | _a978-3-658-19238-9 | ||
| 100 | _aAlexey Ivanov | ||
| 245 | 0 | _aSilicon Anodization as a Structuring Technique | |
| 260 | _bSpringer | ||
| 260 | _c2018 | ||
| 650 | _a"Engineering; Nanotechnology and Microengineering; Mathematical and Computational Engineering; Engineering Thermodynamics, Heat and Mass Transfer" | ||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-3-658-19238-9 | ||
| 942 | _cEBOOK | ||
| 999 |
_c37586 _d37586 |
||