000 00423nam a2200133Ia 4500
008 210311s9999 xx 000 0 und d
020 _a9780470544273
100 _aGrill
245 0 _aCold Plasma Materials Fabrication: From Fundamentals to Applications
260 _bIEEE
650 _a"Components, Circuits, Devices and Systems"
856 _uhttps://ieeexplore.ieee.org/servlet/opac?bknumber=5271223
942 _cEBOOK
999 _c40297
_d40297