| 000 | 00416nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 210311s9999 xx 000 0 und d | ||
| 020 | _a9780471790280 | ||
| 100 | _aMay | ||
| 245 | 0 | _aFundamentals of Semiconductor Manufacturing and Process Control | |
| 260 | _bIEEE | ||
| 650 | _a"Components, Circuits, Devices and Systems" | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?bknumber=5201952 | ||
| 942 | _cEBOOK | ||
| 999 |
_c40513 _d40513 |
||